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Handbook of Plasma Processing Technology Stephen M. Rossnagel

Handbook of Plasma Processing Technology By Stephen M. Rossnagel

Handbook of Plasma Processing Technology by Stephen M. Rossnagel

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Summary

Presents a comprehensive overview of the technology of plasma-based processing.

Handbook of Plasma Processing Technology Summary

Handbook of Plasma Processing Technology: Fundamental, Etching, Deposition and Surface Interactions by Stephen M. Rossnagel

This is a comprehensive overview of the technology of plasma-based processing, written by an outstanding group of 29 contributors.

Handbook of Plasma Processing Technology Reviews

The text provides and excellent reference for plasma processing. --SAMPE Journal

Table of Contents

Techniques for IC ProcessingIntroduction to Plasma Concepts and Discharge ConfigurationsFundamentals of Sputtering and ReflectionBombardment-Induced Compositional Changes with Alloys, Oxides, Oxysalts, and HalidesRF Diode Sputter Etching and DepositionMagnetron Plasma Deposition ProcessesBroad-Beam Ion SourceReactive Ion EtchingReactive Sputter DepositionPlasma Enhanced Chemical Vapor Deposition of Thin Films for MicroelectronicsElectron Cyclotron Resonance Microwave Discharges for Etching and Thin Film DepositionHollow Cathode Etching and DepositionIon PlatingIonized Cluster Beam (ICB) Deposition TechniquesThe Activated Reactive Evaporation (ARE) ProcessFormation of Thim Films by Remote Plasma Enhanced Chemical Vapor Deposition (Remote PECVD)Selective Bias Sputter DepositionVacuum Arc-Based ProcessingIon Source Interactions: General UnderstandingsIon Assisted DepositionMicrostructural Control of Plasma-Sputtered Refractory Coatings

Additional information

NPB9780815512202
9780815512202
0815512201
Handbook of Plasma Processing Technology: Fundamental, Etching, Deposition and Surface Interactions by Stephen M. Rossnagel
Stephen M. Rossnagel
New
Hardback
William Andrew Publishing
1990-12-31
546
N/A
Book picture is for illustrative purposes only, actual binding, cover or edition may vary.
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Customer Reviews - Handbook of Plasma Processing Technology