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Multi-Wafer Rotating MEMS Machines Jeffrey Lang

Multi-Wafer Rotating MEMS Machines By Jeffrey Lang

Multi-Wafer Rotating MEMS Machines by Jeffrey Lang

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Describes the collaboration and research that was developed to produce the MIT Gas Turbine Engine. Both the engine and generator are fabricated from silicon using a combination of bulk and surface microfabrication technologies. This book discusses the technical details that have gone into producing the engine and the overall systems-level.

Multi-Wafer Rotating MEMS Machines Summary

Multi-Wafer Rotating MEMS Machines: Turbines, Generators, and Engines by Jeffrey Lang

Multi-Wafer Rotating MEMS Machines: Turbines, Generators, and Engines is an outgrowth of the MIT Micro Engine Project. This project began at the Massachusetts Institute of Technology in the Fall of 1995, and later expanded through collaborations with the Georgia Institute of Technology, the Clark Atlanta University, and the University of Maryland at College Park.

The overall objective of the Micro Engine Project was to develop a small but power-dense gas turbine generator based on MEMS fabrication technologies. Thus, the project sought to develop a fuel-burning jet engine that would drive an electric generator to produce electric power for general purpose use. Along the way, the project would advance the science and engineering of many disciplines from the MEMS perspective.

The Micro Engine Project was by its very nature a highly mult-disciplinary project pursuing advances in materials, structures, fabrication, combustion, heat transfer, turbomachinery, bearings and electromechanics, all at the MEMS scale. Many of thesetopicsare addressed in this volume, including:

materials structures and packaging

multi-wafer MEMS fabrication and and bonding technologiesElectroplating magnetic components

electroplating magnetic structures into silicon

very-high-speed air bearings

thermofluids and turbomachinery

electric and magnetic generators


About The MEMs Reference Shelf:

"The MEMs Reference Shelf is a series devoted to Micro-Electro-Mechanical Systems (MEMs) which combine mechanical, electrical, optical, or fluidic elements on a common microfabricated substrate to create sensors, actuators, and microsystems. The series, authored by leading MEMs practitioners, strives to provide a framework where basic principles, known methodologies and new applications are integratedin a coherent and consistent manner."

Massachusetts Institute of Technology, Professor of Electrical Engineering, Emeritus

Table of Contents

to PowerMEMS.- System Design Considerations and Device Overview.- Materials, Structures and Packaging.- Microengine Fabrication.- Fabrication of Microscale Rotating Magnetic Machines.- High-Speed Gas Bearings for Micro-Turbomachinery.- Thermofluidics and Turbomachinery.- Motors and Generators.- Microcombustors for Rotating Machinery.

Additional information

Multi-Wafer Rotating MEMS Machines: Turbines, Generators, and Engines by Jeffrey Lang
Springer-Verlag New York Inc.
Book picture is for illustrative purposes only, actual binding, cover or edition may vary.
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