Name: Fundamentals of Semiconductor Fabrication By Gary S. May
SKU: 9780471232797
Price: 32.05 USD
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Fundamentals of Semiconductor Fabrication Summary

Fundamentals of Semiconductor Fabrication by Gary S. May

Offers a basic, up-to-date introduction to semiconductor fabrication technology, including both the theoretical and practical aspects of all major steps in the fabrication sequence Presents comprehensive coverage of process sequences Introduces readers to modern simulation tools Addresses the practical aspects of integrated circuit fabrication Clearly explains basic processing theory

About Gary S. May

Gary S. May, Ph.D. is Executive Assistant to the President and Motorola Foundation Professor of Microelectronics in the School of Electrical and Computer Engineering at the Georgia Institute of Technology. Dr. May was a national Science Foundation national Young Investigator, Georgia Tech's Outstanding Young Alumnus, received Georgia Tech's Outstanding Service Award, and was named a Giant of Science by the Quality Education for Minorities network in 2001. He was a member of the NSF Engineering Advisory Committee, served on and chaired the NSF Committee for Equal Opportunity in Science and Engineering, and was Editor-in-Chief for IEEE Transactions of Semiconductor Manufacturing from 1997 to 2001. Dr. May currently serves as chair of the National Advisory Board for the National Society of Black Engineers. Simon M. Sze, Ph.D. is UMC Chair Professor of National Chiao Tung University, and President of the National Nano Device Laboratories. He has received the IEEE Ebers Award, the Sun Yet-sen Award, the National Science and Technology Award, and the National Chair Professor Award. He is a Life Fellow of IEEE, a member of the Academia Sinica, the Chinese Academy of Engineering, and the US National Academy of Engineering. He has authored or coauthored over 150 technical papers, and has written, edited, and contributed to 24 books. His book Physics of Semiconductor Devices (Wiley 1969, 2nd Ed, 1981) is the most cited work in contemporary engineering and applied science publications (over 12,000 citations from ISI Press).

Chapter 1. Introduction. Chapter 2. Crystal Growth. Chapter 3. Silicon Oxidation. Chapter 4. Photolithography. Chapter 5. Etching. Chapter 6. Diffusion. Chapter 7. Ion Implantation. Chapter 8. Film Deposition. Chapter 9. Process Integration. Chapter 10. IC Manufacturing. Chapter 11. Future Trends and Challenges. Appendix A: List of Symbols. Appendix B: International System of Units (SI Units). Appendix C: Unit Prefixes. Appendix D: Greek Alphabet. Appendix E: Physical Constants. Appendix F: Properties of Si and GaAs at 300 K. Appendix G: Some Properties of the Error Function. Appendix H: Basic Kinetic Theory of Gases. Appendix I: SUPREM Commands. Appendix J: Running PROLITH. Appendix K. Percentage Points of the t Distribution. Appendix L: Percentage Points of the F Distribution. Index.

Additional information

Sku

CIN0471232793VG

ISBN 13

9780471232797

ISBN 10

0471232793

Title

Fundamentals of Semiconductor Fabrication by Gary S. May

Author

Gary S. May

Condition

Used - Very Good

Binding type

Paperback

Publisher

John Wiley & Sons Inc

Year published

2007-08-28

Number of pages

320

Prizes

N/A

Cover note

Book picture is for illustrative purposes only, actual binding, cover or edition may vary.

Note

This is a used book - there is no escaping the fact it has been read by someone else and it will show signs of wear and previous use. Overall we expect it to be in very good condition, but if you are not entirely satisfied please get in touch with us

Fundamentals of Semiconductor Fabrication Gary S. May

Fundamentals of Semiconductor Fabrication by Gary S. May

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Fundamentals of Semiconductor Fabrication Summary

Fundamentals of Semiconductor Fabrication by Gary S. May

About Gary S. May

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