Emphasising on fabrication, this is a collection of contributed readings, by nationally recognized authorities in VLSI technology.
VLSI TECHNOLOGY 2E (6/P) Summary
VLSI TECHNOLOGY 2E (6/P) by SZE
This is a superb state-of-the-art collection of contributed readings, by nationally recognized authorities in VLSI technology. The emphasis of this text is on fabrication.
Table of Contents
Chapter 1: Crystal Growth and water prepreparationChapter 2: EpitaxyChapter 3: OxidationChapter 4: LithographyChapter 5: Reactive Plasma EtchingChapter 6: Dielectric and Polysilicon Film DepositionChapter 7: Diffusion, Ion ImplementationChapter 8: MetallizationChapter 9: Process SimulationChapter 10: LSI Process IntegrationChapter 11: Analytical TechniquesChapter 12: Assembly techniques and Packaging of VLSI DevicesChapter 13: Yield and Reliability
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