VLSI TECHNOLOGY 2E (6/P) by SZE
This is a superb state-of-the-art collection of contributed readings, by nationally recognized authorities in VLSI technology. The emphasis of this text is on fabrication.
VLSI TECHNOLOGY 2E (6/P)
Summary
Emphasising on fabrication, this is a collection of contributed readings, by nationally recognized authorities in VLSI technology.
VLSI TECHNOLOGY 2E (6/P) Summary
Table of Contents
Chapter 1: Crystal Growth and water prepreparationChapter 2: EpitaxyChapter 3: OxidationChapter 4: LithographyChapter 5: Reactive Plasma EtchingChapter 6: Dielectric and Polysilicon Film DepositionChapter 7: Diffusion, Ion ImplementationChapter 8: MetallizationChapter 9: Process SimulationChapter 10: LSI Process IntegrationChapter 11: Analytical TechniquesChapter 12: Assembly techniques and Packaging of VLSI DevicesChapter 13: Yield and Reliability
Additional information
GOR002284604
9780071003476
0071003479
VLSI TECHNOLOGY 2E (6/P) by SZE
Used - Very Good
Paperback
McGraw-Hill Education - Europe
19980516
688
N/A
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This is a used book - there is no escaping the fact it has been read by someone else and it will show signs of wear and previous use. Overall we expect it to be in very good condition, but if you are not entirely satisfied please get in touch with us