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Introduction to Focused Ion Beams Lucille A. Giannuzzi

Introduction to Focused Ion Beams By Lucille A. Giannuzzi

Introduction to Focused Ion Beams by Lucille A. Giannuzzi

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Summary

Introduction to Focused Ion Beams is geared towards techniques and applications. This is the only text that discusses and presents the theory directly related to applications and the only one that discusses the vast applications and techniques used in FIBs and dual platform instruments.

Introduction to Focused Ion Beams Summary

Introduction to Focused Ion Beams: Instrumentation, Theory, Techniques and Practice by Lucille A. Giannuzzi

Introduction to Focused Ion Beams is geared towards techniques and applications. This is the only text that discusses and presents the theory directly related to applications and the only one that discusses the vast applications and techniques used in FIBs and dual platform instruments.

Table of Contents

The Focused Ion Beam Instrument.- Ion - Solid Interactions.- Focused Ion Beam Gases for Deposition and Enhanced Etch.- Three-Dimensional Nanofabrication Using Focused Ion Beams.- Device Edits and Modifications.- The Uses of Dual Beam FIB in Microelectronic Failure Analysis.- High Resolution Live Imaging of FIB Milling Processes for Optimum Accuracy.- FIB for Materials Science Applications - a Review.- Practical Aspects of FIB Tem Specimen Preparation.- FIB Lift-Out Specimen Preparation Techniques.- A FIB Micro-Sampling Technique and a Site Specific TEM Specimen Preparation Method.- Dual-Beam (FIB-SEM) Systems.- Focused Ion Beam Secondary Ion Mass Spectrometry (FIB-SIMS).- Quantitative Three-Dimensional Analysis Using Focused Ion Beam Microscopy.- Application of FIB in Combination with Auger Electron Spectroscopy.

Additional information

NPB9780387231167
9780387231167
0387231161
Introduction to Focused Ion Beams: Instrumentation, Theory, Techniques and Practice by Lucille A. Giannuzzi
Lucille A. Giannuzzi
New
Hardback
Springer-Verlag New York Inc.
2004-11-19
357
N/A
Book picture is for illustrative purposes only, actual binding, cover or edition may vary.
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